Download these files from the website.

T-013-MM-SP-001-K3, Rev. 1.4C, 0.13 UM RF 1P8M SALICIDE 1.2V/2.5V/3.3V 1P8M FSG PDK (CR013G)(CADENCE OA6.1 VERSION) [16-FEB-2012; 647M bytes]
T-013-MM-SP-001-K4, Rev. 1.4C_3, 0.13 UM RF 1P8M SALICIDE 1.2V/2.5V/3.3V 1P8M FSG PDK PATCH (CR013G)(CADENCE OA6.1 VERSION) [26-DEC-2012; 4754k bytes]

Our software installation location is /net/sw/mosis/tsmc. So I put the above zip files in there and extracted them.

K3

[tsmc]$ unzip T-013-MM-SP-001-K3.zip
[tsmc]$ tar xzf tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K3_v1.4c_IC61_20120217_all.tar.gz
[tsmc]$ tar xzf tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K3_v1.4c_IC61_20120217.tar.gz

[tsmc]$ ./pdkInstall.pl 
match library name:tsmc13
Total Case Selection:3
*Avaliable types of PROC are: 
   1 - 0.13um MS/RF 1.2v/2.5v
   2 - 0.13um MS/RF 1.2v/3.3v
Please enter your choice: (1,2...)
1


*Avaliable types of MIMCAP are: 
   1 - 1.0fF_MIM
   2 - 1.5fF_MIM
Please enter your choice: (1,2...)
1


*Avaliable types of METAL are: 
   1 - 1p8m_5X1Z1U_CURDL
   2 - 1p8m_6X1Z0U_CURDL
   3 - 1p7m_4X1Z1U_CURDL
   4 - 1p7m_5X1Z0U_CURDL
   5 - 1p6m_3X1Z1U_CURDL
   6 - 1p6m_4X1Z0U_CURDL
   7 - 1p5m_2X1Z1U_CURDL
   8 - 1p5m_3X1Z0U_CURDL
   9 - 1p4m_1X1Z1U_CURDL
   10 - 1p4m_2X1Z0U_CURDL
Please enter your choice: (1,2...)
1


Please enter your Installation Directory Name: 
pdk
Please confirm with your selection : 
*********************************************************
*** Select PROC : 0.13um MS/RF 1.2v/2.5v
*** Select MIMCAP : 1.0fF_MIM
*** Select METAL : 1p8m_5X1Z1U_CURDL
*** Install to directory : pdk
*********************************************************
Are these correct (y|n) ?
y
mv: cannot stat `current_process.txt': No such file or directory
====== Copying Lib files ======
Complete 
====== Installing pdk library ======
Running "rm -rf tsmc13rf/M1_NACTIVE" ......
Running "rm -rf tsmc13rf/M1_NPOLYG" ......
Running "rm -rf tsmc13rf/M1_NWELL" ......
.
.
.
Running "cp -rf ../Raw_data/tsmc13rf/rm4n tsmc13rf/rm4" ......
Running "cp -rf ../Raw_data/tsmc13rf/rm3n tsmc13rf/rm3" ......
Found "/net/sw/mosis/tsmc/pdk/models/hspice/temp.mdl"
Generating "/net/sw/mosis/tsmc/pdk/models/hspice/hspice.mdl" .....
*Info: PDK installation completed.

That finished the K3 install. Now I just needed to install the K4 patch.

K4

[tsmc]$ unzip T-013-MM-SP-001-K4.zip 
Archive:  T-013-MM-SP-001-K4.zip
  inflating: T013MMSP001K4_1_4C_3.pdf  
  inflating: tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221_all.tar.gz  
[tsmc]$ tar xzf tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221_all.tar.gz 
[tsmc]$ tar xzvf tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221.tar.gz 
[tsmc]$ mv tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221 pdk
[tsmc]$ cd pdk
[pdk]$ cd tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221/
[tsmc13rf_FSG_12v_25v_33v_T-013-MM-SP-001-K4_v1.4c_Patch3_20121221]$ ./pdkPatchInstall.pl 
Install the V1.4c_3  into "../tsmc13rf"(y/n)?y
PDK patch installation complete.

The file /net/sw/mosis/tsmc/pdk/tsmc13 contains all the choices that we made for the installation.

[pdk]$ more tsmc13
*** Select PROC : 0.13um MS/RF 1.2v/2.5v
*** Select MIMCAP : 1.0fF_MIM
*** Select METAL : 1p8m_5X1Z1U_CURDL

Here is a link to our previous tsmc installation, where we had some other choices: 2014 1st attempt.

Here is a link to our first tsmc installation attempt: Old notes.